ASML Holding N.V. said its normalized net income for the fourth quarter came to 95 euro cents per share, compared with the S&P Capital IQ consensus estimate of 98 cents per share.
EPS rose 69.5% year over year from 56 cents.
Normalized net income, which excludes unusual gains or losses on a pre- and after-tax basis, was €406.5 million, a gain of 68.9% from €240.7 million in the year-earlier period.
The normalized profit margin rose to 21.3% from 16.8% in the year-earlier period.
Total revenue increased 33.0% on an annual basis to €1.91 billion from €1.43 billion, and total operating expenses grew 27.0% on an annual basis to €1.33 billion from €1.05 billion.
Reported net income increased 54.6% on an annual basis to €530.1 million, or €1.24 per share, from €342.9 million, or 80 cents per share.
For the year, the company's normalized net income totaled €2.87 per share, compared with the S&P Capital IQ consensus normalized EPS estimate of €3.21.
EPS rose from €2.68 in the prior year.
Normalized net income was €1.23 billion, an increase from €1.16 billion in the prior year.
Full-year total revenue increased from the prior-year period to €6.79 billion from €6.29 billion, and total operating expenses increased on an annual basis to €4.88 billion from €4.43 billion.
The company said reported net income decreased year over year to €1.56 billion, or €3.64 per share, in the full year, from €1.62 billion, or €3.74 per share.